发明名称 |
DIODE-LASER ILLUMINATOR WITH INTERCHANGEABLE MODULES FOR CHANGING IRRADIANCE AND BEAM DIMENSIONS |
摘要 |
<p>Projection apparatus for projecting a radiation spot on a working plane includes a plurality of stacks of diode-laser bars. Each stack provides a beam of laser radiation. The diode-laser bars in each stack are arranged one above another in the fast-axis direction of the diode-laser bars. A corresponding plurality of beam-expanders expands the beam from the corresponding diode-laser bar stack in the slow-axis direction of the diode laser bars only. A focusing lens collects the slow-axis expanded beams and projects the slow-axis expanded beams into the working plane to form the radiation spot.</p> |
申请公布号 |
EP2695255(A2) |
申请公布日期 |
2014.02.12 |
申请号 |
EP20120717938 |
申请日期 |
2012.03.30 |
申请人 |
COHERENT, INC. |
发明人 |
KUCHIBHOTLA, S., KRISHNA;ZHENG, XING, MING |
分类号 |
G02B19/00;B23K26/06;B23K26/073;B23K26/34;G02B27/09;H01L21/268;H01S5/00;H01S5/40 |
主分类号 |
G02B19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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