CANTILEVER EXCITATION DEVICE AND SCANNING PROBE MICROSCOPE

摘要

Provided is a cantilever excitation device capable of preventing complication of resonance characteristics by a simple configuration. A cantilever excitation device (1) is provided with a cantilever (7), a cantilever holder (3) for holding the cantilever (7), and a piezoelectric vibrator (5) attached to the cantilever holder (3). The cantilever holder (3) includes a holder main part (11) (first part) having an acoustic impedance different from that of the piezoelectric vibrator (5) for transmitting vibration of the piezoelectric vibrator by elastic deformation and an attachment piece (13) (second part) having the acoustic impedance different from that of the first part for forming a material boundary to block propagation of an acoustic wave between the same and the first part. The first and second parts are interposed between the piezoelectric vibrator (5) and the cantilever (7).