| 摘要 |
<p>An integrated circuit is disclosed comprising a MEMS (microelectromechanical system) element (10) in a plane of the integrated circuit, the MEMS element being suspended in a cavity (160) over a substrate (100), said cavity including a first cavity region (20) in said plane spatially separating an edge of the MEMS element from a wall section (12) of the cavity, said edge being arranged to be displaced relative to the wall section; and a second cavity region (30) in said plane forming part of a fluid path further including the first cavity region, said fluid path defining a first volume; and a third cavity region (34) in said plane defining a second volume in fluid connection with the second cavity region, wherein the maximum width of the second cavity region is larger than the maximum width of the third cavity region, the second and third cavity regions having maximum widths that are larger than the maximum width of the first cavity region, and wherein at least a part of the second volume is excluded from the fluid path.</p> |
