| 摘要 |
PURPOSE: An assembly for holding a substrate for forming a pattern and an apparatus for depositing an organic thin film including the same are provided to prevent a substrate from being sagged by evenly arranging a magnetic force supply part in a surrounding area and a center area around a entire area of a substrate. CONSTITUTION: A pattern forming part(10) includes a mask(10a) and a first frame(10b). A pattern to be transcribed on one side of a substrate(G) is designed on the mask. The first frame is included to surround the mask. A substrate adsorption part(12) includes an electrostatic chuck(12a) and a second frame(12b). The electrostatic chuck adsorbs the other side of the substrate with an electrostatic force. The second frame is included to surround the electrostatic chuck. |
