发明名称 MICROMIRROR ELEMENT AND MICROMIRROR ARRAY
摘要 The present invention relates to a micromirror device having a reflecting portion and an electrode portion facing the reflecting portion. The reflecting portion includes a first movable beam and a second movable beam each having one end fixed and the other end displaceable. The first movable beam and the second movable beam are arranged in a line at a predetermined distance. A mirror is arrayed in a line with the beams and rotationally arranged between the beams. The first movable beam and the second movable beam are connected to the mirror. The electrode portion includes a driving electrode for the first movable beam; a driving electrode for the second movable beam; mirror driving electrodes; and two first wall electrodes and two second wall electrodes.
申请公布号 CA2764402(C) 申请公布日期 2014.02.11
申请号 CA20082764402 申请日期 2008.04.15
申请人 NIPPON TELEGRAPH AND TELEPHONE CORPORATION 发明人 USUI, MITSUO;UCHIYAMA, SHINGO;SHIMOKAWA, FUSAO;HASHIMOTO, ETSU;YAMAGUCHI, JOHJI;MATSUURA, TOHRU;KONISHI, TOSHIFUMI
分类号 G02B26/08;B81B3/00 主分类号 G02B26/08
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