| 发明名称 |
METHOD FOR OBTAINING OF COPPER COATING ON CERAMIC SURFACE BY GAS-DYNAMIC SPUTTERING |
| 摘要 |
FIELD: metallurgy.SUBSTANCE: invention refers to method for obtainment of adhesion-strong copper coating on ceramic surface using gas-dynamic sputtering. Underlayer of copper oxide (l) is preliminary sputtered followed by copper coating sputtering and coating thermal treatment. Sputtering of underlayer material and copper coating is performed under air pressure as working gas within range of 0.5-1.0 MPa. At that for underalyer this temperature is 500-600°C, for copper coating it is 300-400°C, and thermal treatment of copper coating is performed within 1065-1070°C during 1.0-3.0 hours.EFFECT: obtaining copper coatings with tear strength not less than 50 MPa.1 ex |
| 申请公布号 |
RU2506345(C1) |
申请公布日期 |
2014.02.10 |
| 申请号 |
RU20120126338 |
申请日期 |
2012.06.22 |
| 申请人 |
FEDERAL'NOE GOSUDARSTVENNOE BJUDZHETNOE UCHREZHDENIE NAUKI INSTITUT NEORGANICHESKOJ KHIMII IM. A.V.NIKOLAEVA SIBIRSKOGO OTDELENIJA ROSSIJSKOJ AKADEMII NAUK;FEDERAL'NOE GOSUDARSTVENNOE BJUDZHETNOE UCHREZHDENIE NAUKI INSTITUT TEORETICHESKOJ I PRIKLADNOJ MEKHANIKI IM. A.S. KHRISTIANOVICHA SIBIRSKOGO OTDELENIJA ROSSIJSKOJ AKADEMII NAUK |
发明人 |
MISHCHENKO ALEKSANDR VASIL'EVICH;FEDOROV VLADIMIR EFIMOVICH;NAUMOV NIKOLAJ GENNAD'EVICH;TARASENKO MARIJA SERGEEVNA;FOMIN VASILIJ MIKHAJLOVICH;KOSAREV VLADIMIR FEDOROVICH;KLINKOV SERGEJ VLADIMIROVICH;LAVRUSHIN VIKTOR VLADMIROVICH;TRUBACHEEV GEORGIJ VIKTOROVICH |
| 分类号 |
C23C24/04;C23C4/06;C23C4/12 |
主分类号 |
C23C24/04 |
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