| 摘要 |
FIELD: nanotechnology.SUBSTANCE: invention relates to nanoelectronics and nanoelectromechanics and can be used in various fields of modern nanotechnology industry, microelectronics, alternative energy, etc. The method of improvement of wear resistance of nanostructured coating of granulated composite "metal-ceramic", predominantly (COPeB)(CaP)obtained by the method of ion beam deposition on a substrate, and which represents a nanostructured material comprising metallic granules with an average diameter of preferably 2-6 nm located in the volume of the ceramic matrix, is characterised in that the concentration of the metal phase during the deposition is selected in a range of 20-60 at.%, preferably 30-56 at.%.EFFECT: invention provides improved wear resistance, high dimensional stability, while reduction of costs.1 dwg |
