HIGH DIELECTRIC NANOSHEET LAMINATE, HIGH DIELECTRIC ELEMENT AND METHOD FOR MANUFACTURING HIGH DIELECTRIC ELEMENT

摘要

A high dielectric nanosheet laminate is produced by laminating nanosheets, each of which has a thickness of 10 nm or less and is formed of an oxide that has a perovskite structure wherein at least four NbO6 octahedrons, TaO6 octahedrons or TiO6 octahedrons are included in a unit lattice. Consequently, the high dielectric nanosheet laminate is capable of achieving a high dielectric constant and a satisfactory insulation property, which are preferable for high dielectric nanosheet multilayer capacitors or the like, at the same time even if formed very thin.