发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 The present invention relates to a semiconductor device and a method for fabricating the same. In particular, the present invention relates to an anti-fuse technique of a dual structure where a planar gate and a burying gate are formed. According to the present invention, the semiconductor device includes a first gate structure buried in the semiconductor substrate of a peripheral circuit region, and a second gate structure formed in the upper part of the semiconductor substrate. According to the present invention, the gate insulating layer of a program transistor is thin in order to rupture easily while at the same time, the gate insulating layer of a select transistor is thick in order to improve the reliability of the select transistor.
申请公布号 KR20140016068(A) 申请公布日期 2014.02.07
申请号 KR20120083218 申请日期 2012.07.30
申请人 SK HYNIX INC. 发明人 JUNG, YONG SUN
分类号 H01L23/62;H01L21/82 主分类号 H01L23/62
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