发明名称 PROCEDE ET DISPOSITIF DE FABRICATION DE COUCHE DE MATERIAU SEMI-CONDUCTEUR
摘要 The invention concerns a method for fabricating a substrate in semiconductor material characterized in that it comprises the steps of: starting from a donor substrate in a first semiconductor material at an initial temperature, contacting a surface of the donor substrate with a bath of a second semiconductor material held in the liquid state at a temperature higher than the initial temperature, the second semiconductor material being chosen so that its melting point is equal to or lower than the melting point of the first semiconductor material, solidifying the bath material on the surface to thicken the donor substrate with a solidified layer. The invention also concerns a device for implementing the method.
申请公布号 FR2978600(B1) 申请公布日期 2014.02.07
申请号 FR20110056770 申请日期 2011.07.25
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES 发明人 BRUEL MICHEL
分类号 H01L21/02 主分类号 H01L21/02
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