发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method of the same which can reduce chip area.SOLUTION: A semiconductor device according to an embodiment comprises: a laminate which includes a plurality of conductive layers and a plurality of insulation layers each provided every between the conductive layers, and includes a step-like structure part having a step array in which steps of the plurality of conductor layers are arranged in a row in a first direction in a step-wise manner; and a plurality of vias which are provided on respective steps in the step-like structure part and reach the conductive layers of respective steps. The step array includes a deepest part, one step provided adjacently to the deepest part in the first direction and having a level difference of one stage from the deepest part, and a plurality of steps each having a level difference of multiple stages from the respective neighboring steps in the first direction.
申请公布号 JP2014027104(A) 申请公布日期 2014.02.06
申请号 JP20120166071 申请日期 2012.07.26
申请人 TOSHIBA CORP 发明人 KIDO NOZOMI;KOMORI YOSUKE
分类号 H01L21/8247;H01L21/336;H01L27/10;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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