发明名称 OPTICAL WAVEGUIDE AND OPTICAL WAVEGUIDE MIRROR
摘要 Provided is a light path conversion mirror that is provided to an optical waveguide comprising an organic polymer, wherein a reflective film structure is realized that has high reflectivity, has excellent durability, and is inexpensive and suitable for mass production. In the optical waveguide in which a core and a cladding are comprised of an organic polymer, a light path conversion mirror is formed by forming an inclined surface at least inside the core, and forming on the inclined surface a laminated structure comprising a tantalum film and a copper film that is formed on the tantalum film and has a thickness of 200-400nm inclusive. Using a copper film with a tantalum film interposed therein improves absolute reflectivity.
申请公布号 WO2014021411(A1) 申请公布日期 2014.02.06
申请号 WO2013JP70837 申请日期 2013.08.01
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY 发明人 AMANO TAKERU;UKITA SHIGENARI;KOMORI KAZUHIRO
分类号 G02B6/122 主分类号 G02B6/122
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