| 摘要 |
According to one embodiment, a pattern formation method includes grouping an unevenness pattern of a template into a plurality of groups having different pattern sizes. The method includes using a nozzle having a relatively small nozzle diameter to dispense an imprint resist in liquid form into a region on a substrate where the unevenness pattern of a group of the plurality of groups having a relatively small pattern size is to be aligned, and using a nozzle having a relatively large nozzle diameter to dispense the liquid imprint resist into one other region on the substrate where the unevenness pattern of a group of the plurality of groups having a relatively large pattern size is to be aligned. The method includes curing the imprint resist. The method includes releasing the template from the cured imprint resist. |
