VIBRATION PIECE, VIBRATION ELEMENT, VIBRATOR, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, MOVABLE BODY AND MANUFACTURING METHOD FOR VIBRATION PIECE

摘要

PROBLEM TO BE SOLVED: To provide a small-sized vibration piece that allows an energy confinement effect in a Z'-axis direction of a mode of thickness shear vibration that is main vibration in an AT-cut crystal vibration piece with an X-axis direction of a quartz crystal as long sides to be improved, and further to provide a manufacturing method therefor.SOLUTION: A manufacturing method for a vibration piece includes the steps of: preparing a rotated Y-cut crystal substrate constituted of a crystal flat plate having a surface including an X-axis serving as a crystal axis of a crystal and a Z'-axis obtained by rotating a Z-axis serving as a crystal axis toward a -Y-axis side of a Y-axis serving as a crystal axis with the X-axis as a rotational axis as a main surface and a Y'-axis direction as a thickness obtained by rotating the Y-axis serving as the crystal axis toward a -Z-axis side of the Z-axis serving as the crystal axis with the X-axis as the rotational axis; and performing etching on at least one of lateral surfaces intersecting with the Z'-axis so as to form at least four faces on the at least one of lateral surfaces.