发明名称 PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a processing device which can early restart processing by taking the most suitable countermeasure against the occurrence of abnormality in the processing device.SOLUTION: The processing device for processing a workpiece includes: holding means for holding a workpiece; processing means for processing the workpiece held by the holding means; reading means for reading an identification code of a worker operating the processing device to specify the worker; and control means including at least a processing means control unit for controlling the operation of the processing means and an abnormality detection unit for detecting abnormality occurring during processing to stop the operation of the processing means. The control means includes a transmission unit which is connected to a terminal device via a communication line and transmits at least worker information specified by reading the identification code by the reading means, operational state information of the processing means controlled by the processing means control unit, and abnormality information detected by the abnormality detection unit, to the terminal device.
申请公布号 JP2014026436(A) 申请公布日期 2014.02.06
申请号 JP20120165771 申请日期 2012.07.26
申请人 DISCO ABRASIVE SYST LTD 发明人 KAJIWARA YUSUKE;TANAKA HIDEAKI;UCHIDA FUMIO
分类号 G05B19/418;H01L21/301 主分类号 G05B19/418
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