发明名称 Nonvolatile memory device and method fabricating the same
摘要 PURPOSE: A nonvolatile memory device and a method for fabricating the same are provided to facilitate a charge injection process by forming a charge trapping layer made of a nanoadsorption material. CONSTITUTION: A tunnel oxide layer is formed on a semiconductor substrate. A charge trapping layer (130) has a first region and a second region. The charge trapping layer is made of a nanoadsorption material. A blocking oxide layer (140) is formed on the charge trapping layer. A gate electrode (150) is formed on the blocking oxide layer.
申请公布号 KR101357849(B1) 申请公布日期 2014.02.06
申请号 KR20120028861 申请日期 2012.03.21
申请人 发明人
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
代理机构 代理人
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