| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that since a sample exchange chamber is exhausted at all times even when it is not used, it is required to always operate one rotary pump consuming power most among the apparatus, and thereby the user must bear the running cost of many apparatuses, and extra energy is consumed.SOLUTION: The charged particle beam device in which a sample is introduced into a sample chamber via a sample exchange chamber includes a first vacuum pump for evacuating the sample exchange chamber, a second vacuum pump for evacuating the sample chamber, and a first valve provided in an exhaust path between the sample exchange chamber and the first vacuum pump. The first vacuum pump can be turned off while turning the second vacuum pump on, and open/close of the first valve is interlocked with switching of power supply to the first vacuum pump. |
