PIEZOELECTRIC DEVICE, PIEZOELECTRIC ACTUATOR, HARD DISK DRIVE, INK JET PRINTER APPARATUS, AND PIEZOELECTRIC SENSOR

摘要

A piezoelectric device (100) according to the present invention is provided with a first electrode film (5), a first nonmetal electroconductive intermediate film (4) provided on the first electrode film (5), a piezoelectric film (3) provided on the first nonmetal electroconductive intermediate film (4), a second nonmetal electroconductive intermediate film (2) provided on the piezoelectric film(3), and a second electrode film (1) provided on the second nonmetal electroconductive intermediate film (2). A linear expansion coefficient of the first nonmetal electroconductive intermediate film (4) is larger than those of the first electrode film (5) and the piezoelectric film (3), and a linear expansion coefficient of the second nonmetal electroconductive intermediate film (2) is larger than those of the second electrode film (1) and the piezoelectric film (3).