发明名称 Integrated Semiconductor Device and Wafer Level Method of Fabricating the Same
摘要 The present disclosure provides one embodiment of a stacked semiconductor device. The stacked semiconductor device includes a first substrate; a first bond pad over the first substrate; a second substrate including a second electrical device fabricated thereon; a second bond pad over the second electrical device over the second substrate, the second bond pad electrically connecting to the second electrical device; a second insulation layer over the second bond pad having a top surface, the second insulation layer being bonded toward the first bond pad of the first substrate; and a through-substrate-via ("TSV") extending from a surface opposite to the first bond pad through the first substrate and through the top surface of the second insulation layer to the second bond pad.
申请公布号 US2014035158(A1) 申请公布日期 2014.02.06
申请号 US201313773224 申请日期 2013.02.21
申请人 MANUFACTURING COMPANY, LTD. TAIWAN SEMICONDUCTOR;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHANG KUEI-SUNG;CHENG CHUN-WEN;KALNITSKY ALEX;CHU CHIA-HUA
分类号 H01L23/48;H01L23/00 主分类号 H01L23/48
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