发明名称 Asymmetric Gate MOS Device and Method of Making
摘要 An asymetric gate MOS device is disclosed. The gate is a metal gate, and the metal gate has a different work function on the source side from that on the drain side of the MOS device, so that the overall performance parameters of the MOS device are more optimized. A method of making an asymetric gate MOS device is also disclosed. In the method, dopant ions are implanted into the gate of the MOS device, so as to cause the gate to have a different work function on the source side from that on the drain side of the MOS device. As a result, the overall performance parameters of the MOS device are more optimized. The method can be easily implemented.
申请公布号 US2014034956(A1) 申请公布日期 2014.02.06
申请号 US201113635071 申请日期 2011.10.31
申请人 WU DONGPING;HU CHENG;ZHU LUN;ZHU ZHIWEI;ZHANG SHILI;ZHANG WEI;FUDAN UNIVERSITY 发明人 WU DONGPING;HU CHENG;ZHU LUN;ZHU ZHIWEI;ZHANG SHILI;ZHANG WEI
分类号 H01L21/285;H01L21/28;H01L29/04;H01L29/66;H01L29/78 主分类号 H01L21/285
代理机构 代理人
主权项
地址