GAS PRESSURE MEASUREMENT CELL ARRANGEMENT

摘要

A gas pressure measuring cell configuration has a thermal conduction vacuum cell according to Pirani (Pi), with a measuring chamber housing enclosing a measuring chamber and with a measuring connection which channels the gas pressure P to be measured into the measuring chamber. The measuring chamber has a heatable measuring filament connected to an electronic measuring circuitry. The electronic measuring circuitry is in thermal contact on one side of an insulating carrier plate and the carrier plate forms on the opposite side a component of the measuring chamber housing, wherein the measuring filament in series with a measuring resistor (Rm) is supplied directly by the electronic measuring circuitry in feedback and wherein the electronic measuring circuitry directly determines the resistance of the measuring filament.