APPRATUS FOR SEPARATING AND RECOVERING FLUORINATED GAS, AND THE METHOD FOR SEPARATING AND RECOVERING OF FLUORINATED GAS THEREBY

摘要

The present invention relates to an apparatus for separating and recovering fluorinated gas and a method for separating and recovering fluorinated gas using the same and more particularly to an apparatus for separating and recovering fluorinated gas including a device for separating fluorinated gas and a device for recovering fluorinated gas. The device for separating fluorinated gas comprises a gas supply part for supplying mixed gas including fluorinated gas; a separation part including one or separation membrane modules for separating fluorinated gas from the mixed gas, including an inlet for injecting the mixed gas from the gas supply part, a separation membrane for separating fluorinated gas, a transmission hole for discharging non-fluorinated gas having fluorinated gas separated by the separation membrane, and an outlet for discharging the fluorinated gas separated by the separation membrane; an emission control part connected to the outlet of the separation module to control the flow rate of the fluorinated gas being discharged from the separation membrane module; and a decompression pump connected to the transmission hole of the separation membrane module to supply a driving force for transmitting the non-fluorinated gas from the separation membrane module. The device for recovering fluorinated gas comprises a supply part for supplying the mixed gas discharged from the outlet of the separating device; an adsorption part having one or more fluorinated gas adsorption columns interconnected parallel to receive the mixed gas from the gas supply part and to adsorb fluorinated gas; and a decompression pump connected to the adsorption part to recover the adsorbed fluorinated gas.