发明名称 Stress barrier structures for semiconductor chips
摘要 Stress barrier structures for semiconductor chips, and methods of fabrication thereof are described. In one embodiment, the semiconductor device includes a semiconductor substrate that includes active circuitry and an interconnect metallization structure over the active circuitry, wherein the interconnect metallization structure includes a layer of low-k insulating layer. A first metal bump is disposed over the semiconductor substrate and coupled to the active circuitry of the semiconductor substrate. A first stress barrier structure is disposed under the metal bump, and disposed over the low-k insulating layer, and a second substrate is disposed over the first metal bump.
申请公布号 US8643149(B2) 申请公布日期 2014.02.04
申请号 US20100683604 申请日期 2010.01.07
申请人 CHEN MING-FA;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHEN MING-FA
分类号 H01L23/48;H01L23/498 主分类号 H01L23/48
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