| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing method capable of suppressing volatilization of a fluorine-containing organic solvent for drying prevention until a substrate is carried in a processing container, and decomposition of the fluorine-containing organic solvent in the processing container.SOLUTION: A substrate W having a surface covered with a first fluorine-containing organic solvent is carried in a processing container 31, and a high pressure fluid using a second fluorine-containing organic solvent, having a boiling point lower than that of the first fluorine-containing organic solvent, as a raw material is supplied to the processing container 31. A high pressure fluid atmosphere of a mixture of the first fluorine-containing organic solvent and second fluorine-containing organic solvent is formed in the processing container 31, the first fluorine-containing organic solvent covering the surface of the substrate is removed, and the fluid in the processing container 31 is discharged in the state of high pressure fluid or gas thus obtaining a dried substrate W. |
