| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device in which the edge information at the bottom of a high aspect structure, such as a deep hole or a deep groove, is manifested.SOLUTION: The charged particle beam device includes an aperture forming member having an aperture for passing a charged particle beam emitted from a charged particle beam source, and a detector for detecting charged particles brought about by collision of charged particles passed through the aperture and collided against other member. The charged particle beam device is further provided with a deflector for deflecting the charged particles emitted from a sample, and a controller for controlling the deflector. The controller controls the deflector so the trajectory of the charged particles emitted from the sample is moved, and performs length measurement based on the detection signals before and after deflection by the deflector. |
