| 摘要 |
PROBLEM TO BE SOLVED: To obtain a solar cell manufacturing apparatus which does not cause poor etching due to sneaking of an etchant on the periphery of the light-receiving surface of a solar cell, in a single-sided etching process of a solar cell.SOLUTION: A semiconductor substrate 20 for forming a solar cell is held on a transportable susceptor 10 while directing the surface to be etched upward, and the semiconductor substrate 20 is etched by puddling an etchant 16 from the upper side. Furthermore, a non-etching liquid is fed upward in a state of laminar flow to the inside of the semiconductor substrate 20 on the susceptor 10, and fed downward on the periphery of the semiconductor substrate 20, thus providing a single-sided etching device in which poor sneaking of the etchant does not occur on the periphery of the light-receiving surface 20A of the semiconductor substrate 20. |
