| 摘要 |
PROBLEM TO BE SOLVED: To prepare DLC (Diamondlike Carbon) powder suitable as a raw material for OLC(Onion Like Carbon) at a significantly lower cost.SOLUTION: In accordance with a device 10 for preparing DLC powder of the present invention, the argon gas as a gas for discharge and the acetylene gas as a raw material gas are introduced into a vacuum tank 12 via a gas introduction pipe 24. A pulse power Ep as a power for discharge is then supplied between the vacuum tank 12 as an anode and a crucible 16 as a cathode. Accordingly, a plasma 200 is generated in the vacuum tank 12 and the carbon ions in the plasma 200 collide with the inner wall of the crucible 16, thereby producing DLC powder 100 on the inner wall of the crucible 16. At this time, unwanted polymerized powder is created on the inner wall of the vacuum tank 12 upon the polymerization reaction of the carbon radicals in the plasma 200. The creation of this polymerized powder is significantly suppressed by temporally modulating the pulse power Ep. |
