| 摘要 |
PROBLEM TO BE SOLVED: To provide a goniostage having a valve opening/closing mechanism.SOLUTION: The goniostage comprises a valve opening/closing mechanism which includes: a gate valve; a guide roller provided on the gate valve; a first vacuum O-ring provided on the gate valve; and a shaft for driving the gate valve. The gate valve and the shaft are arranged so that they can be pivoted about at least one fulcrum. In a preferred embodiment of the goniostage of the invention, the valve opening/closing mechanism further includes a support roller. |
