| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique capable of efficiently injecting ions.SOLUTION: An ion injection method is an ion injection method by hybrid scanning. The ion injection method has steps of: presetting a scanning speed of ion beam and a scanning speed of an object during ion injection; and injecting ions on the basis of the preset scanning speed of the ion beam and the preset scanning speed of the object. In the presetting step, plural scanning speeds of the ion beam are set on the basis of scanning amplitude of the ion beam varying in accordance with a surface shape of the object radiated by ions so that a scanning frequency of the ion beam is kept constant. The scanning speed of the object corresponding to the scanning speed of the ion beam is set so that an amount per unit area for injecting ions to be injected to the surface of the object is kept constant. |
