| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that when coating a glass substrate directly with an α-ray blocking material, the glass substrate is warped by the stress of the α-ray blocking material.SOLUTION: The manufacturing method of an image sensor includes a film formation step for forming an α-ray blocking film on a silicon substrate, a bonding step for bonding the silicon substrate and a glass substrate by bringing the α-ray blocking film into contact with the glass substrate, a removal step for removing the silicon substrate, and a fixing step for fixing the glass substrate to an imaging chip, including an image capturing region where a plurality of pixels are arranged, so that the α-ray blocking film faces the image capturing region. |
