| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor physical quantity sensor capable of preventing degrading of detection accuracy.SOLUTION: A semiconductor physical quantity sensor 10 has a semiconductor substrate 20 formed with a cavity 21 and a dielectric thin plate 61 disposed over the cavity 21 and comprises: a dielectric member 60 fixed to one surface 20a of the semiconductor substrate 20; and a light receiving element 40 disposed over the dielectric thin plate 61. The dielectric member 60 has flexibility and includes a beam section 63 protruding from the dielectric thin plate 61 and fixed to the semiconductor substrate 20. The dielectric member 60 is also configured to be partially supported by the semiconductor substrate 20 by means of a support portion 62 formed in a part of the dielectric member 60. In a free state of the beam section 63, a space S2 is formed between the one surface of the semiconductor substrate 20 and the support portion 62. |
