MICROWAVE HEATING PROCESSING DEVICE AND PROCESSING METHOD

摘要

The support device (4) of this microwave heating processing device (1) has: a tubular shaft (14) penetrating the approximate middle of the bottom (13) of a processing vessel (2) and extending to the outside of the processing vessel (2); a dielectric plate (15) provided approximately horizontally at the vicinity of the top end of the shaft (14); a plurality of support pins (16) as support members mounted removably to the peripheral edge of the dielectric plate (15); a rotation drive unit (17); and a lifting/lowering drive unit (18). The dielectric plate (15) is interposed between a wafer (W) and the bottom (13) of the processing vessel (2) in a state separated from the wafer (W), and promotes the absorption of microwaves by the wafer (W) by means of altering the state of the microwaves below the wafer (W).