| 摘要 |
A probe microscope head (10) of a scanning probe microscope is provided with: a scanning mechanism (11) which scans a cantilever chip (1) along an X-axis, a Y-axis, and a Z-axis that are orthogonal to each other; and an optical transmission plate (20) which is disposed in contact with liquid. The optical transmission plate (20) causes detection light for detecting the displacement of a cantilever of the cantilever chip (1) to transmit therethrough, and is not scanned by the scanning mechanism (11). |
