| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow sensor having corrosion resistance.SOLUTION: A flow sensor includes: a glass-made pedestal 11; a heat radiation member 51 arranged inside the pedestal 11; semi-solid material 52 filled between the inner wall of the pedestal 11 and the heat radiation member 51; and a chip 20 arranged on the pedestal 11. The chip 20 includes: a glass-made substrate 21 arranged on the upper surface of the pedestal 11; a flow speed detection part 22 including an electric resistance element 23, which is arranged on the upper surface of the substrate 21; and electrodes 24A, 24B which penetrate through the substrate 21 and are electrically connected to the electric resistance element 23. |
