| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow sensor having corrosion resistance.SOLUTION: A flow sensor includes: a glass-made pedestal 11; a glass-made substrate 21 arranged on the upper surface of the pedestal 11; a flow speed detection part 22 including an electric resistance element 23 which is arranged on the upper surface of the substrate 21; and an electrode which penetrates through the substrate 21 and is electrically connected to the electric resistance element 23. |
