发明名称 Gradient vacuum for high-flux x-ray source
摘要 <p>An X-ray tube (100) for generating an X-ray beam (102), the X-ray tube (100) comprising a rotatably mounted anode (104) arranged and configured to generate X-rays upon exposure to an electron beam (106), a hollow space (108) within the anode (104), a cooling unit (110) configured for cooling the anode (104) by fluid circulation within the hollow space (108), and a vacuum pump arrangement (114, 136, 150) configured for generating a first vacuum (116) within the hollow space (108) and a second vacuum (118) in a space (112) surrounding the anode (104), wherein the second vacuum (118) relates to a pressure value being lower than a pressure value relating to the first vacuum (116), wherein the vacuum pump arrangement (114, 136, 150) comprises a pump (114) arranged for forming a continuous pressure gradient between the first vacuum (116) and the second vacuum (118).</p>
申请公布号 EP2690646(A1) 申请公布日期 2014.01.29
申请号 EP20120178137 申请日期 2012.07.26
申请人 AGILENT TECHNOLOGIES, INC. 发明人 KUCHARCZYK, DAMIAN
分类号 H01J35/10;H01J35/20 主分类号 H01J35/10
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