CONTROL APPARATUS, SEMICONDUCTOR TESTING APPARATUS, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To determine failures of DUTs and detect defective sections by comparing the results of analysis with one another. SOLUTION: A non-defective DUT is connected to any power supply current analyzing device among n-pieces of power supply current analyzing devices 1 to perform tests in the semiconductor testing apparatus 100. A computer 17 stores the results of analysis inputted from each frequency analyzing unit 84, compares the results of analysis of the power supply current analyzing device connected to the non-defective DUT with the results of analysis of another power supply current analyzing device, and detects a defective DUT. In the case that the defective DUT is detected, defective sections are detected by recursively dividing a test pattern and further performing the tests.