| 摘要 |
PURPOSE: A method for manufacturing thin films including fluorine and the thin films are provided to improve corrosion and wear resistance by controlling property of the thin films. CONSTITUTION: A method for manicuring thin films including fluorine comprises following steps. A surface of a material (10) in a chamber is activated, and pre-processed by inputting reaction gas for removing foreign matters left. A middle layer (20) is coated on the surface of the material by injecting the reaction gas including Si in order to stick to the inner part of the chamber. A DLC layer (30) of the middle layer is coated by injecting hydrocarbon gas into the chamber. A fluorine layer (40) is coated on the DLC layer by injecting fluorination gas in order to improve corrosion and wear resistance of the chamber. |
