THE ORGANIC SOLUTION SUPPLY NOZZLE AND, A COATING APPARATUS HAVING THE SAME

摘要

Provided is an organic solution coating apparatus including a nozzle which has a super oil repellent surface. According to an embodiment of the present invention specification, the coating apparatus may include a rotary chuck and an organic solution supply nozzle which has a super oil repellent surface. A substrate is attached and fixed on the rotary chuck. The super oil repellent surface supplies an organic solution to the substrate and has a contact angle of 90 degrees or more with the organic solution.