发明名称 LAYOUT SCHEME AND METHOD FOR FORMING DEVICE CELL IN SEMINCONDUCTOR DEVICES
摘要 <p>A method and layout for forming word line decoder devices and other devices having word line decoder cells provides for forming metal interconnect layers using non-DPL photolithography operations and provides for stitching distally disposed transistors using a lower or intermediate metal layer or a subjacent conductive material. The transistors may be disposed in or adjacent longitudinally arranged word line decoder or other cells and the conductive coupling using the metal or conductive material lowers gate resistance between transistors and avoids RC signal delays.</p>
申请公布号 KR101355263(B1) 申请公布日期 2014.01.27
申请号 KR20110076018 申请日期 2011.07.29
申请人 发明人
分类号 H01L21/8244;H01L27/11 主分类号 H01L21/8244
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