发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 The present invention relates to a semiconductor device and a method for fabricating the same. Especially, the present invention relates to a technique capable of preventing the collapse of a storage node by forming a multilayer structure where a nitride floating capacitor (NFC) connected to another storage node. The semiconductor device includes storage nodes formed on a semiconductor substrate including a lower structure, a multi support layer patter of a multilayered type formed between the storage nodes. Each NFC pattern among the multi NFC patterns has a different type.
申请公布号 KR20140010269(A) 申请公布日期 2014.01.24
申请号 KR20120077256 申请日期 2012.07.16
申请人 SK HYNIX INC. 发明人 HWANG, JU HEE
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
代理机构 代理人
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