| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel calibration method of an interference shape measurement machine not using a three-surface aligning method, capable of highly accurately measuring a straight shape by the interference shape measurement machine and measuring a surface shape by using the result.SOLUTION: A systematic error of an interference shape measurement mechanism and an unknown shape error of a measured object are separated in two directions to obtain two straight shape data. Such calibrated straight shape data groups are associated with each other to constitute a surface, and calibration as a surface is completed. |
