| 摘要 |
PROBLEM TO BE SOLVED: To provide a resin composition for forming pattern capable of forming a sea-island structure consisting of one island part having a cylindrical phase separation structure and a sea part surrounding the island part in a hole.SOLUTION: A resin composition for forming pattern for hole shrinking contains a block copolymer I comprising an aromatic ring containing polymer a and a (meth)acrylate polymer b and a (meth)acrylate polymer II consisting of repeating units of the (meth)acrylate polymer b. When the mass of the block copolymer I is defined as Wand the mass of the (meth)acrylate polymer II is defined as W, W/W≥1, when the mass of the aromatic ring containing polymer is defined as Wand the mass of the (meth)acrylate polymer b is defined as W, 1≤W/W≤9, the number average molecular weight of the (meth)acrylate polymer b is defined as Mand the number average molecular weight of the (meth)acrylate polymer (II) is defined as M, 0.01≤M/M≤2. |
