发明名称 MEMS DEVICE WITH IMPROVED FILTER
摘要 <p>A gas sensor comprising: at least one active element; and a filtering cap comprising a porous filtering element for counteracting the ingress of one or more atmospheric gases to the active element. There is a separation between the active element and the filtering element of the cap and the filtering element comprises a mechanically densified powder of filtering material.</p>
申请公布号 WO2014012951(A1) 申请公布日期 2014.01.23
申请号 WO2013EP65040 申请日期 2013.07.16
申请人 SGX SENSORTECH SA 发明人 DELPRAT, HERVE
分类号 G01N33/00 主分类号 G01N33/00
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