| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for measuring light interference, capable of enlarging an application range, improving measurement accuracy, and improving reliability.SOLUTION: A device includes a beam splitter 2 for dividing a departure beam 3 emitted from a light source 1 into a measurement beam 4 and a reference beam 5, optical overlapping means, a first detector 6, and a second detector 13. The divided first part reception beam 41b is overlapped with the first part reference beam 51 on the detection surface of the first detector 6, and the second part reception beam 42b is overlapped with the second part reference beam 52 on the detection surface of the second detector 13 to create light interference. To evaluate the measurement signals of the first detector 6 and the second detector 13, the measurement signals of both detectors are evaluated by a diversity reception method. |
