| 摘要 |
PURPOSE: A cleaner for a probe unit is provided to remove abnormal materials adhered to a cleaner for the probe unit regardless of a test process. CONSTITUTION: A cleaner(100) for a probe unit comprises a cylinder(110), a sliding block(120), a guide member(130), a sanding block(140), an air injection pipe(150) and a Z-axis control block. The cylinder is installed in the bottom surface of a base plate and operated by a driving source. The sliding block is fixed at the upper side of the cylinder. The guide member is rotated at both sides of the sliding block. A cam hole is formed at one end of the guide member. The sanding block is fixed at the other end. The sanding member sands the electrode portion of the probe block. Air is sprayed to the electrode portion of the probe block. The Z-axis control block is installed in the cam hole of the guide member. |
