| 摘要 |
An inspection system and a method for defect detection, the method includes: generating a first beam that includes a near infrared spectral component and a visible light component; directing at least the near infrared spectral component towards a backside of an inspected object, the backside includes first elements made of a substantially transparent to near infrared radiation first material and second elements that are made of a second material arranged to reflect near infrared radiation; directing, towards a sensor, a near infrared spectral component of a second beam generated from the illuminating of the inspected object; wherein the sensor is sensitive to visible light radiation and to near infrared radiation; generating, by the sensor, detection signals that are responsive to the near infrared component of the second beam; and detecting at least one attribute of at least the second elements by processing the detection signals. |
