METHOD FOR MEASURING SOLID SAMPLE BY DISCHARGE EMISSION SPECTROSCOPY

摘要

PROBLEM TO BE SOLVED: To provide an analytic method for an organic or polymeric solid sample by discharge emission spectroscopy in which SN ratio of a signal to be detected is improved.SOLUTION: A method for measuring a solid sample including at least one organic material layer by discharge emission spectroscopy comprises steps of: disposing the sample in a discharge emission lamp; supplying mixture gas containing at least one kind of rare gas and gaseous oxygen into the discharge emission lamp, in which concentration of the gaseous oxygen is controlled to 1 mass% to 10 mass% of the mixture gas; generating discharge emission plasma by inducing electrical discharge at a radio frequency type on an electrode of the discharge emission lamp; irradiating the organic material layer with the plasma; and measuring at least one kind of a signal representing an ion species and/or an excited species of the plasma by spectroscopic analysis.