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发明名称
用于减少泄漏电流之浮动闸极上之介电层及其形成方法
摘要
本发明揭示一种包含一组非挥发性储存元件之记忆体系统。一既定记忆体单元在浮动闸极上具有一介电罩盖。在一项实施例中,该介电罩盖驻存于该浮动闸极与一保形IPD层之间。该介电罩盖减少该浮动闸极与一控制闸极之间的泄漏电流。该介电罩盖藉由减少该浮动闸极顶部处之电场之强度来达成泄漏电流减少,在无用于具有一窄芯柱之一浮动闸极之该介电罩盖之情形下,该浮动闸极顶部处系该电场将系为最强之处。
申请公布号
TWI424537
申请公布日期
2014.01.21
申请号
TW098123248
申请日期
2009.07.09
申请人
桑迪士克科技公司 美国
发明人
凯 詹姆斯K;李 丹娜;欧利莫托 塔凯希 菲特尼;普拉亚斯 威诺德R;玛塔米斯 乔治;钦 亨利
分类号
H01L21/8247;H01L29/786
主分类号
H01L21/8247
代理机构
代理人
黄章典 台北市松山区敦化北路201号7楼
主权项
地址
美国
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