| 摘要 |
The present invention relates to a guide roller for a substrate processing apparatus which includes: an inner ring fixed to the stationary shaft; an outer combined to the inner ring, with the ability to rotate, by a ball bearing prepared tangentially to the outside of the inner ring; and a covering unit directly in contact with the substrate being transferred, with the outer circumference of the outer ring covered by the substrate. The present invention is prepared with a detachable cover on the outside of the outer ring so that the cover can be contact with the side of the substrate, and when abrasion occurs by the contact with the substrate, then only the cover can be replaced, thus effective for reducing maintenance costs. |
